About the Professor: Prof. Erwin received his MSc (1996) and PhD (with honors) (2000) in Applied Physics from TU/e. His doctoral thesis work was partly carried out at the University of California Santa Barbara and as a Postdoc, he was affiliated to the Colorado State University and Philipps University in Marburg (Germany). In February 2025, he was appointed as an Applied Materials Visiting Professor under the AMAT Chair Professorship, in the Department of Materials Science and Engineering, College of Design and Engineering.
Topic 1: Plasma-surface interaction during atomic scale processing: Studying the reactive species coming to the surface Speaker: Gurp, Marnix Van, 2nd-year PhD candidate applying a variety of laser-based diagnostics to study plasma-surface interactions relevant to ALD and ALE. He also uses lasers for fundamental characterization of high-k stacks.
Abstract: Plasmas are essential in atomic-scale processes, such as: ALD, ALE, and surface treatments. However, it is often unclear which reactive plasma species are formed and delivered to the surface, limiting process control and physical understanding. In this talk, we report on our approach to measure fundamental plasma properties in our dedicated reactor using a variety of techniques, ranging from simple monitoring tools to advanced laser diagnostics.
Topic 2: In-situ RAIRS for the investigation of the surface chemistry during half-cycles in ALD
Speaker: Werf, Sjoerd Van Der, 1st-year PhD candidate working on ALD of high-k dielectrics on graphene for CMOS compatible optoelectronic devices. Previously he worked with Applied Materials on ALD of low-k dielectrics for innerspacer fabrication for GAA-FET applications.
Abstract: The talk will mostly focus on the use of IR spectroscopy and more specifically reflection absorption infrared spectroscopy (RAIRS) as a diagnostic to gain information on the evolution of surface species during an ALD cycle.
Topic 3: Tuning conductive nitrides through ion energy control in PEALD
Speaker: Peeters, Silke, 4th-year PhD candidate working on atomic layer deposition and etching of superconducting thin films, where she tailors the processes to the requirements of quantum technologies ranging from single-photon detectors to quantum bits.
Abstract: Thin films of conductive metal-nitride are key components in current and next-generation computing. The synthesis of conductive metal-nitride films on the nanometer-scale remains challenging. By controlling the ion-energy during plasma-enhanced atomic layer deposition, conductive films can be prepared at low temperature and short plasma exposure, and microstructure and composition can be tuned.
Topic 4: Beyond the conventional ALD process: Advanced approaches for controlling the properties and growth of WS₂ and MoS₂ 2D Materials
Speaker: Lam, Cindy, 3rd-year PhD candidate focusing on the growth of 2D TMDCs such as MoS₂ and WS₂ using advanced (plasma-enhanced) atomic layer deposition processes to tailor their material properties for nanoelectronic applications.
Abstract: As the semiconductor industry is progressing toward the Ångström era of transistor scaling, atomically thin 2D transition metal dichalcogenides (TMDCs) are potential future candidates to replace the current Si-based channel material in next-generation field-effect transistors (FETs). Atomic layer deposition (ALD) holds great promise as a deposition technique to grow 2D TMDCs directly on device-relevant substrates (i.e. transfer-free), conformal growth in 3D structures and back-end-of-line (BEOL) compatible temperatures. In this talk, I will present an overview of the ALD processes we have developed to establish a versatile library of TMDC materials (including MoS₂, WS₂, NbS₂ and TiS₂ ) and demonstrate how plasma (pre)treatments and supercycle approaches enable precise control over the film properties for targeted applications.